Fabrication of Sawfish photonic crystal cavities in bulk diamond

Color centers in diamonds are quantum systems with optically active spin-states that show long coherence times and are, therefore, a promising candidate for the development of efficient spin–photon interfaces. However, only a small portion of the emitted photons is generated by the coherent optical...

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Main Authors: Tommaso Pregnolato, Marco E. Stucki, Julian M. Bopp, Maarten H. v. d. Hoeven, Alok Gokhale, Olaf Krüger, Tim Schröder
Format: Article
Language:English
Published: AIP Publishing LLC 2024-03-01
Series:APL Photonics
Online Access:http://dx.doi.org/10.1063/5.0186509
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author Tommaso Pregnolato
Marco E. Stucki
Julian M. Bopp
Maarten H. v. d. Hoeven
Alok Gokhale
Olaf Krüger
Tim Schröder
author_facet Tommaso Pregnolato
Marco E. Stucki
Julian M. Bopp
Maarten H. v. d. Hoeven
Alok Gokhale
Olaf Krüger
Tim Schröder
author_sort Tommaso Pregnolato
collection DOAJ
description Color centers in diamonds are quantum systems with optically active spin-states that show long coherence times and are, therefore, a promising candidate for the development of efficient spin–photon interfaces. However, only a small portion of the emitted photons is generated by the coherent optical transition of the zero-phonon line (ZPL), which limits the overall performance of the system. Embedding these emitters in photonic crystal cavities improves the coupling to the ZPL photons and increases their emission rate. Here, we demonstrate the fabrication process of “Sawfish” cavities, a design recently proposed that has the experimentally realistic potential to simultaneously provide a high waveguide coupling efficiency and significantly enhance the emission rate. The presented process allows for the fabrication of fully suspended devices with a total length of 20.5 μm and feature sizes as small as 40 nm. The optical characterization shows fundamental mode resonances that follow the behavior expected from the corresponding design parameters and quality (Q) factors as high as (3800 ± 1200). Finally, we investigate the effects of nanofabrication on the devices and show that, despite a noticeable erosion of the fine features, the measured cavity resonances deviate by only 0.8 (1.2)% from the values estimated by simple inspection via scanning electron microscopy. This proves that the Sawfish design is robust against fabrication imperfections, which makes it an attractive choice for the development of quantum photonic networks.
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spelling doaj.art-cb65edf6feac491bacf92261a8b9f33e2024-04-02T19:30:50ZengAIP Publishing LLCAPL Photonics2378-09672024-03-0193036105036105-710.1063/5.0186509Fabrication of Sawfish photonic crystal cavities in bulk diamondTommaso Pregnolato0Marco E. Stucki1Julian M. Bopp2Maarten H. v. d. Hoeven3Alok Gokhale4Olaf Krüger5Tim Schröder6Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, GermanyFerdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, GermanyFerdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, GermanyDepartment of Physics, Humboldt-Universität zu Berlin, Newtonstr. 15, 12489 Berlin, GermanyDepartment of Physics, Humboldt-Universität zu Berlin, Newtonstr. 15, 12489 Berlin, GermanyFerdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, GermanyFerdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, GermanyColor centers in diamonds are quantum systems with optically active spin-states that show long coherence times and are, therefore, a promising candidate for the development of efficient spin–photon interfaces. However, only a small portion of the emitted photons is generated by the coherent optical transition of the zero-phonon line (ZPL), which limits the overall performance of the system. Embedding these emitters in photonic crystal cavities improves the coupling to the ZPL photons and increases their emission rate. Here, we demonstrate the fabrication process of “Sawfish” cavities, a design recently proposed that has the experimentally realistic potential to simultaneously provide a high waveguide coupling efficiency and significantly enhance the emission rate. The presented process allows for the fabrication of fully suspended devices with a total length of 20.5 μm and feature sizes as small as 40 nm. The optical characterization shows fundamental mode resonances that follow the behavior expected from the corresponding design parameters and quality (Q) factors as high as (3800 ± 1200). Finally, we investigate the effects of nanofabrication on the devices and show that, despite a noticeable erosion of the fine features, the measured cavity resonances deviate by only 0.8 (1.2)% from the values estimated by simple inspection via scanning electron microscopy. This proves that the Sawfish design is robust against fabrication imperfections, which makes it an attractive choice for the development of quantum photonic networks.http://dx.doi.org/10.1063/5.0186509
spellingShingle Tommaso Pregnolato
Marco E. Stucki
Julian M. Bopp
Maarten H. v. d. Hoeven
Alok Gokhale
Olaf Krüger
Tim Schröder
Fabrication of Sawfish photonic crystal cavities in bulk diamond
APL Photonics
title Fabrication of Sawfish photonic crystal cavities in bulk diamond
title_full Fabrication of Sawfish photonic crystal cavities in bulk diamond
title_fullStr Fabrication of Sawfish photonic crystal cavities in bulk diamond
title_full_unstemmed Fabrication of Sawfish photonic crystal cavities in bulk diamond
title_short Fabrication of Sawfish photonic crystal cavities in bulk diamond
title_sort fabrication of sawfish photonic crystal cavities in bulk diamond
url http://dx.doi.org/10.1063/5.0186509
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