3D Super-Resolution Optical Profiling Using Microsphere Enhanced Mirau Interferometry

3D Super-Resolution Optical Profiling Using Microsphere Enhanced Mirau Interferometry

Abstract We present quantitative three dimensional images of grooves on a writable Blu-ray Disc based on a single objective Mirau type interferometric microscope, enhanced with a microsphere which is considered as a photonic nanojet source. Along the optical axis the resolution of this microsphere a...

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Bibliographic Details
Main Authors: Ivan Kassamakov, Sylvain Lecler, Anton Nolvi, Audrey Leong-Hoï, Paul Montgomery, Edward Hæggström
Format: Article
Language:English
Published: Nature Portfolio 2017-06-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-017-03830-6

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