A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications
This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2015-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/3/6872 |
| _version_ | 1811280007719288832 |
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| author | Fangming Deng Yigang He Bing Li Lei Zuo Xiang Wu Zhihui Fu |
| author_facet | Fangming Deng Yigang He Bing Li Lei Zuo Xiang Wu Zhihui Fu |
| author_sort | Fangming Deng |
| collection | DOAJ |
| description | This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of −20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation. |
| first_indexed | 2024-04-13T01:05:56Z |
| format | Article |
| id | doaj.art-cbe6f00897b54600a84eba652afab04b |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T01:05:56Z |
| publishDate | 2015-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-cbe6f00897b54600a84eba652afab04b2022-12-22T03:09:21ZengMDPI AGSensors1424-82202015-03-011536872688410.3390/s150306872s150306872A CMOS Pressure Sensor Tag Chip for Passive Wireless ApplicationsFangming Deng0Yigang He1Bing Li2Lei Zuo3Xiang Wu4Zhihui Fu5School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, ChinaSchool of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, ChinaSchool of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, ChinaSchool of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, ChinaSchool of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, ChinaSchool of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, ChinaThis paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of −20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation.http://www.mdpi.com/1424-8220/15/3/6872pressure sensorRFID technologyCMOS processcapacitive sensor interfacerectifier |
| spellingShingle | Fangming Deng Yigang He Bing Li Lei Zuo Xiang Wu Zhihui Fu A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications Sensors pressure sensor RFID technology CMOS process capacitive sensor interface rectifier |
| title | A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications |
| title_full | A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications |
| title_fullStr | A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications |
| title_full_unstemmed | A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications |
| title_short | A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications |
| title_sort | cmos pressure sensor tag chip for passive wireless applications |
| topic | pressure sensor RFID technology CMOS process capacitive sensor interface rectifier |
| url | http://www.mdpi.com/1424-8220/15/3/6872 |
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