Fabrication and Polishing Performance of Diamond Self-Sharpening Gel Polishing Disk

Fabrication and Polishing Performance of Diamond Self-Sharpening Gel Polishing Disk

A diamond gel polishing disk with self-sharpening ability is proposed to solve the problem of glazing phenomenon in the gel polishing disks. Aluminum nitride (AlN) powder with silica sol film coating (A/S powder) is added to the polishing disk, and a specific solution is used to dissolve the A/S pow...

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Bibliographic Details
Main Authors: Lanxing Xu, Kaiping Feng, Liang Zhao, Binghai Lyu
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Micromachines
Subjects:
gel polishing disk
self-sharpening
ultrafine diamond
4H-SiC wafer
AlN powder
Online Access:https://www.mdpi.com/2072-666X/15/1/56

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