Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane

Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane

Changes associated to atomic layer deposition (ALD) of SiO<sub>2</sub> from 3-aminopropyl triethoxysilane (APTES) and O<sub>3</sub>, on a nanoporous alumina structure, obtained by two-step electrochemical anodization in oxalic acid electrolyte (Ox sample) are analysed. A redu...

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Bibliographic Details
Main Authors: Ana Silvia González, Víctor Vega, Ana Laura Cuevas, María del Valle Martínez de Yuso, Víctor M. Prida, Juana Benavente
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Materials
Subjects:
nanoporous alumina structure
atomic layer deposition
surface modification
APTES and ozone precursors
XPS
impedance and optical measurements
Online Access:https://www.mdpi.com/1996-1944/14/17/5052

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https://www.mdpi.com/1996-1944/14/17/5052

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