Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures
In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitte...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-11-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/17/11/2652 |
| _version_ | 1798006060387139584 |
|---|---|
| author | Limin Zou He Ni Peng Zhang Xuemei Ding |
| author_facet | Limin Zou He Ni Peng Zhang Xuemei Ding |
| author_sort | Limin Zou |
| collection | DOAJ |
| description | In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm. |
| first_indexed | 2024-04-11T12:48:56Z |
| format | Article |
| id | doaj.art-cccb570cef08481e93b9ea5be55e4e38 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T12:48:56Z |
| publishDate | 2017-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-cccb570cef08481e93b9ea5be55e4e382022-12-22T04:23:16ZengMDPI AGSensors1424-82202017-11-011711265210.3390/s17112652s17112652Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of MicrostructuresLimin Zou0He Ni1Peng Zhang2Xuemei Ding3Department of Automatic Test and Control, Harbin Institute of Technology, Harbin 150080, ChinaDepartment of Automatic Test and Control, Harbin Institute of Technology, Harbin 150080, ChinaDepartment of Automatic Test and Control, Harbin Institute of Technology, Harbin 150080, ChinaDepartment of Automatic Test and Control, Harbin Institute of Technology, Harbin 150080, ChinaIn this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm.https://www.mdpi.com/1424-8220/17/11/2652fiber optics probetouch trigger probethree-dimensional metrologymicro/nano coordinate measurement machine (CMM) |
| spellingShingle | Limin Zou He Ni Peng Zhang Xuemei Ding Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures Sensors fiber optics probe touch trigger probe three-dimensional metrology micro/nano coordinate measurement machine (CMM) |
| title | Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures |
| title_full | Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures |
| title_fullStr | Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures |
| title_full_unstemmed | Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures |
| title_short | Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures |
| title_sort | assembled cantilever fiber touch trigger probe for three dimensional measurement of microstructures |
| topic | fiber optics probe touch trigger probe three-dimensional metrology micro/nano coordinate measurement machine (CMM) |
| url | https://www.mdpi.com/1424-8220/17/11/2652 |
| work_keys_str_mv | AT liminzou assembledcantileverfibertouchtriggerprobeforthreedimensionalmeasurementofmicrostructures AT heni assembledcantileverfibertouchtriggerprobeforthreedimensionalmeasurementofmicrostructures AT pengzhang assembledcantileverfibertouchtriggerprobeforthreedimensionalmeasurementofmicrostructures AT xuemeiding assembledcantileverfibertouchtriggerprobeforthreedimensionalmeasurementofmicrostructures |