Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures
In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitte...
Main Authors: | Limin Zou, He Ni, Peng Zhang, Xuemei Ding |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-11-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/17/11/2652 |
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