Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures
The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of ( 11 2 ¯ 0 ) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, b...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-11-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/16/11/1112 |
| _version_ | 1798003925540929536 |
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| author | Xiao-Dong Lan Shu-Yi Zhang Li Fan Yan Wang |
| author_facet | Xiao-Dong Lan Shu-Yi Zhang Li Fan Yan Wang |
| author_sort | Xiao-Dong Lan |
| collection | DOAJ |
| description | The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of ( 11 2 ¯ 0 ) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized. |
| first_indexed | 2024-04-11T12:15:22Z |
| format | Article |
| id | doaj.art-cdbcef8f738c46d4acfe82513ac8030c |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T12:15:22Z |
| publishDate | 2016-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-cdbcef8f738c46d4acfe82513ac8030c2022-12-22T04:24:19ZengMDPI AGSensors1424-82202016-11-011611111210.3390/s16111112s16111112Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire StructuresXiao-Dong Lan0Shu-Yi Zhang1Li Fan2Yan Wang3Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaLaboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaLaboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaLaboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, ChinaThe characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of ( 11 2 ¯ 0 ) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized.http://www.mdpi.com/1424-8220/16/11/1112humidity sensorsurface acoustic waveRayleigh waveLove waveFEM simulation |
| spellingShingle | Xiao-Dong Lan Shu-Yi Zhang Li Fan Yan Wang Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures Sensors humidity sensor surface acoustic wave Rayleigh wave Love wave FEM simulation |
| title | Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures |
| title_full | Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures |
| title_fullStr | Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures |
| title_full_unstemmed | Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures |
| title_short | Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures |
| title_sort | simulation of saw humidity sensors based on 11 2 ¯ 0 zno r sapphire structures |
| topic | humidity sensor surface acoustic wave Rayleigh wave Love wave FEM simulation |
| url | http://www.mdpi.com/1424-8220/16/11/1112 |
| work_keys_str_mv | AT xiaodonglan simulationofsawhumiditysensorsbasedon1120znorsapphirestructures AT shuyizhang simulationofsawhumiditysensorsbasedon1120znorsapphirestructures AT lifan simulationofsawhumiditysensorsbasedon1120znorsapphirestructures AT yanwang simulationofsawhumiditysensorsbasedon1120znorsapphirestructures |