Editorial for the Special Issue on Optical MEMS
Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/7/458 |
| _version_ | 1818047898594574336 |
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| author | Huikai Xie Frederic Zamkotsian |
| author_facet | Huikai Xie Frederic Zamkotsian |
| author_sort | Huikai Xie |
| collection | DOAJ |
| description | Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...] |
| first_indexed | 2024-12-10T10:13:06Z |
| format | Article |
| id | doaj.art-cea017a0e468474e9aedad50c5b2862a |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-10T10:13:06Z |
| publishDate | 2019-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-cea017a0e468474e9aedad50c5b2862a2022-12-22T01:53:05ZengMDPI AGMicromachines2072-666X2019-07-0110745810.3390/mi10070458mi10070458Editorial for the Special Issue on Optical MEMSHuikai Xie0Frederic Zamkotsian1Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USAAix Marseille Univ, CNRS, CNES, LAM, Laboratoire d’Astrophysique de Marseille, 38 rue Frederic Joliot Curie, 13388 Marseille CEDEX 13, FranceOptical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]https://www.mdpi.com/2072-666X/10/7/458n/a |
| spellingShingle | Huikai Xie Frederic Zamkotsian Editorial for the Special Issue on Optical MEMS Micromachines n/a |
| title | Editorial for the Special Issue on Optical MEMS |
| title_full | Editorial for the Special Issue on Optical MEMS |
| title_fullStr | Editorial for the Special Issue on Optical MEMS |
| title_full_unstemmed | Editorial for the Special Issue on Optical MEMS |
| title_short | Editorial for the Special Issue on Optical MEMS |
| title_sort | editorial for the special issue on optical mems |
| topic | n/a |
| url | https://www.mdpi.com/2072-666X/10/7/458 |
| work_keys_str_mv | AT huikaixie editorialforthespecialissueonopticalmems AT fredericzamkotsian editorialforthespecialissueonopticalmems |