Influence of annealing temperature on sensing properties of TIOx thin films prepared by magnetron sputtering

Influence of annealing temperature on sensing properties of TIOx thin films prepared by magnetron sputtering

This work describes the influence of the annealing temperature on the optical and surfaceproperties of non-stoichiometric titanium oxide (TiOx) thin films. The results were related to theinvestigation of the sensing response toward H2 gas. The samples were prepared by the magnetronsputtering method...

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Bibliographic Details
Main Authors: Paulina Kapuścik, Ewa Mańkowska, Damian Wojcieszak
Format: Article
Language:English
Published: Military University of Technology, Warsaw 2022-06-01
Series:Biuletyn Wojskowej Akademii Technicznej
Subjects:
materials engineering
titanium oxides
thin films
magnetron sputtering
optical properties
gas sensing properties
Online Access:http://biuletynwat.pl/gicid/01.3001.0016.2780

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