Amorphous/Nanocrystalline High-Entropy CoCrFeNiTi<sub>x</sub> Thin Films with Low Thermal Coefficient of Resistivity Obtained via Magnetron Deposition

Amorphous/Nanocrystalline High-Entropy CoCrFeNiTi<sub>x</sub> Thin Films with Low Thermal Coefficient of Resistivity Obtained via Magnetron Deposition

High-entropy alloys are promising materials for novel thin-film resistors since they have high resistivity and a low-temperature coefficient of resistivity (TCR). In this work, a new high-entropy thin-film CoCrFeNiTi<sub>x</sub> was deposited on a Si/SiO<sub>2</sub> substrate...

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Bibliographic Details
Main Authors: Maksim Poliakov, Dmitry Kovalev, Sergei Vadchenko, Dmitry Moskovskikh, Philipp Kiryukhantsev-Korneev, Lidiya Volkova, Alexander Dudin, Andrey Orlov, Andrey Goryachev, Alexander Rogachev
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Nanomaterials
Subjects:
high-entropy alloy
amorphous structure
magnetron sputtering
thin films
resistors
microelectronic devices
Online Access:https://www.mdpi.com/2079-4991/13/13/2004

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