The role of electron-stimulated desorption in focused electron beam induced deposition

The role of electron-stimulated desorption in focused electron beam induced deposition

We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane. When W(CO)6 is used as a precursor it is observed that the growth r...

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Bibliographic Details
Main Authors: Willem F. van Dorp, Thomas W. Hansen, Jakob B. Wagner, Jeff T. M. De Hosson
Format: Article
Language:English
Published: Beilstein-Institut 2013-08-01
Series:Beilstein Journal of Nanotechnology
Subjects:
desorption energy
focused electron beam induced processing
scanning transmission electron microscopy
temperature dependence
tungsten hexacarbonyl
Online Access:https://doi.org/10.3762/bjnano.4.56

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