Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury

Flexible electronic devices are developing rapidly, especially in medical applications. This paper reports an arrayed flexible piezoelectric micromachined ultrasonic transducer (FPMUT) with a sandwich structure for adjuvant treatment of bone injury. To make the device conformable and stretchable for...

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Main Authors: Huicong Liu, Jiangjun Geng, Qifeng Zhu, Lue Zhang, Fengxia Wang, Tao Chen, Lining Sun
Format: Article
Language:English
Published: MDPI AG 2019-12-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/1/86
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author Huicong Liu
Jiangjun Geng
Qifeng Zhu
Lue Zhang
Fengxia Wang
Tao Chen
Lining Sun
author_facet Huicong Liu
Jiangjun Geng
Qifeng Zhu
Lue Zhang
Fengxia Wang
Tao Chen
Lining Sun
author_sort Huicong Liu
collection DOAJ
description Flexible electronic devices are developing rapidly, especially in medical applications. This paper reports an arrayed flexible piezoelectric micromachined ultrasonic transducer (FPMUT) with a sandwich structure for adjuvant treatment of bone injury. To make the device conformable and stretchable for attaching to the skin surface, the flexible substrate of polydimethylsiloxane (PDMS) was combined with the flexible metal line interconnection between the bulk lead zirconate titanate (PZT) arrays. Simulations and experiments were carried out to verify the resonant frequency and tensile property of the reported FPMUT device. The device had a resonant frequency of 321.15 KHz and a maximum sound pressure level (SPL) of 180.19 dB at the distance of 5 cm in water. In addition, detailed experiments were carried out to test its acoustic performance with different pork tissues, and the results indicated good ultrasound penetration. These findings confirm that the FPMUT shows unique advantages for adjuvant treatment of bone injury.
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spelling doaj.art-cfc096ed3e664ebbb8ca7bf1c08355962022-12-22T01:56:42ZengMDPI AGSensors1424-82202019-12-012018610.3390/s20010086s20010086Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone InjuryHuicong Liu0Jiangjun Geng1Qifeng Zhu2Lue Zhang3Fengxia Wang4Tao Chen5Lining Sun6School of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaSchool of Mechanical and Electric Engineering, Jiangsu Provincial Key Laboratory of Advanced Robotics, Soochow University, Suzhou 215123, ChinaFlexible electronic devices are developing rapidly, especially in medical applications. This paper reports an arrayed flexible piezoelectric micromachined ultrasonic transducer (FPMUT) with a sandwich structure for adjuvant treatment of bone injury. To make the device conformable and stretchable for attaching to the skin surface, the flexible substrate of polydimethylsiloxane (PDMS) was combined with the flexible metal line interconnection between the bulk lead zirconate titanate (PZT) arrays. Simulations and experiments were carried out to verify the resonant frequency and tensile property of the reported FPMUT device. The device had a resonant frequency of 321.15 KHz and a maximum sound pressure level (SPL) of 180.19 dB at the distance of 5 cm in water. In addition, detailed experiments were carried out to test its acoustic performance with different pork tissues, and the results indicated good ultrasound penetration. These findings confirm that the FPMUT shows unique advantages for adjuvant treatment of bone injury.https://www.mdpi.com/1424-8220/20/1/86piezoelectricmicromachinedflexible substrateultrasonic transducer array
spellingShingle Huicong Liu
Jiangjun Geng
Qifeng Zhu
Lue Zhang
Fengxia Wang
Tao Chen
Lining Sun
Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
Sensors
piezoelectric
micromachined
flexible substrate
ultrasonic transducer array
title Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
title_full Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
title_fullStr Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
title_full_unstemmed Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
title_short Flexible Ultrasonic Transducer Array with Bulk PZT for Adjuvant Treatment of Bone Injury
title_sort flexible ultrasonic transducer array with bulk pzt for adjuvant treatment of bone injury
topic piezoelectric
micromachined
flexible substrate
ultrasonic transducer array
url https://www.mdpi.com/1424-8220/20/1/86
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AT jiangjungeng flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury
AT qifengzhu flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury
AT luezhang flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury
AT fengxiawang flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury
AT taochen flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury
AT liningsun flexibleultrasonictransducerarraywithbulkpztforadjuvanttreatmentofboneinjury