A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors
A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si<sub>3</sub>N<sub>4</sub> is presented for N...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-06-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/12/2101 |
| _version_ | 1797483826267553792 |
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| author | Junqiang Wang Zehua Zhu Yue Qi Mengwei Li |
| author_facet | Junqiang Wang Zehua Zhu Yue Qi Mengwei Li |
| author_sort | Junqiang Wang |
| collection | DOAJ |
| description | A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si<sub>3</sub>N<sub>4</sub> is presented for N/MEMS mechanical sensors. It substantially overcomes the poor reliability of previous sensors with suspended graphene and exhibits excellent mechanoelectrical coupling performance, as graphene is placed on the root of the crossbeam. By performing basic mechanical electrical measurements, a preferable gauge factor of ~1.35 is obtained. The sensitivity of the graphene pressure sensor based on the crossbeam structure chip is 33.13 mV/V/MPa in a wide range of 0~20 MPa. Other static specifications, including hysteresis error, nonlinear error, and repeatability error, are 2.0119%, 3.3622%, and 4.0271%, respectively. We conclude that a crossbeam structure with a graphene sensing element can be an application for the N/MEMS mechanical sensor. |
| first_indexed | 2024-03-09T22:52:40Z |
| format | Article |
| id | doaj.art-d02bb70cf6a74f7f9d4c4f3f5d2dadd6 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T22:52:40Z |
| publishDate | 2022-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-d02bb70cf6a74f7f9d4c4f3f5d2dadd62023-11-23T18:17:35ZengMDPI AGNanomaterials2079-49912022-06-011212210110.3390/nano12122101A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical SensorsJunqiang Wang0Zehua Zhu1Yue Qi2Mengwei Li3National Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, ChinaNational Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, ChinaNational Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, ChinaNational Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, ChinaA graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si<sub>3</sub>N<sub>4</sub> is presented for N/MEMS mechanical sensors. It substantially overcomes the poor reliability of previous sensors with suspended graphene and exhibits excellent mechanoelectrical coupling performance, as graphene is placed on the root of the crossbeam. By performing basic mechanical electrical measurements, a preferable gauge factor of ~1.35 is obtained. The sensitivity of the graphene pressure sensor based on the crossbeam structure chip is 33.13 mV/V/MPa in a wide range of 0~20 MPa. Other static specifications, including hysteresis error, nonlinear error, and repeatability error, are 2.0119%, 3.3622%, and 4.0271%, respectively. We conclude that a crossbeam structure with a graphene sensing element can be an application for the N/MEMS mechanical sensor.https://www.mdpi.com/2079-4991/12/12/2101grapheneN/MEMSdisplacement sensorpressure sensor |
| spellingShingle | Junqiang Wang Zehua Zhu Yue Qi Mengwei Li A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors Nanomaterials graphene N/MEMS displacement sensor pressure sensor |
| title | A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors |
| title_full | A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors |
| title_fullStr | A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors |
| title_full_unstemmed | A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors |
| title_short | A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors |
| title_sort | novel crossbeam structure with graphene sensing element for n mems mechanical sensors |
| topic | graphene N/MEMS displacement sensor pressure sensor |
| url | https://www.mdpi.com/2079-4991/12/12/2101 |
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