High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO<sub>3</sub>, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k<su...
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| Format: | Article |
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MDPI AG
2023-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/11/2086 |
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| author | Zhiheng Zhang Weipeng Xuan Hong Jiang Weilun Xie Zhaoling Li Shurong Dong Hao Jin Jikui Luo |
| author_facet | Zhiheng Zhang Weipeng Xuan Hong Jiang Weilun Xie Zhaoling Li Shurong Dong Hao Jin Jikui Luo |
| author_sort | Zhiheng Zhang |
| collection | DOAJ |
| description | In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO<sub>3</sub>, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k<sup>2</sup><sub>eff</sub>) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO<sub>2</sub>/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>λ</mi><mo>/</mo><mn>4</mn><mo>)</mo></mrow></semantics></math></inline-formula> Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system. |
| first_indexed | 2024-03-09T16:36:37Z |
| format | Article |
| id | doaj.art-d0b9adfa5ff248039bed6d74848b6cfd |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T16:36:37Z |
| publishDate | 2023-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-d0b9adfa5ff248039bed6d74848b6cfd2023-11-24T14:56:30ZengMDPI AGMicromachines2072-666X2023-11-011411208610.3390/mi14112086High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg StructureZhiheng Zhang0Weipeng Xuan1Hong Jiang2Weilun Xie3Zhaoling Li4Shurong Dong5Hao Jin6Jikui Luo7Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, ChinaIn this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO<sub>3</sub>, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k<sup>2</sup><sub>eff</sub>) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO<sub>2</sub>/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave (<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mi>λ</mi><mo>/</mo><mn>4</mn><mo>)</mo></mrow></semantics></math></inline-formula> Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system.https://www.mdpi.com/2072-666X/14/11/2086single-crystalline lithium tantalate thin filmSM-YBARoptimized Bragg structurehigh electromechanical coupling |
| spellingShingle | Zhiheng Zhang Weipeng Xuan Hong Jiang Weilun Xie Zhaoling Li Shurong Dong Hao Jin Jikui Luo High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure Micromachines single-crystalline lithium tantalate thin film SM-YBAR optimized Bragg structure high electromechanical coupling |
| title | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
| title_full | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
| title_fullStr | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
| title_full_unstemmed | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
| title_short | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
| title_sort | high electromechanical coupling coefficient of longitudinally excited shear wave resonator based on optimized bragg structure |
| topic | single-crystalline lithium tantalate thin film SM-YBAR optimized Bragg structure high electromechanical coupling |
| url | https://www.mdpi.com/2072-666X/14/11/2086 |
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