Numerical Analysis of Magnetized Sheath for Inner Surface Modification
A fluid model of the magnetized sheath has been built using ion motion equation, ion continuity equation, Poisson's equation, and Boltzmann's relationship of electron for plasma-based low-energy ion implantation (PBLEII) inner surface modification of a tube. Along the central axis from the...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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IEEE
2019-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/8695700/ |
| _version_ | 1818854673062297600 |
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| author | Yi Li Xiaodan Jing Quan Yuan Jiuhui Li |
| author_facet | Yi Li Xiaodan Jing Quan Yuan Jiuhui Li |
| author_sort | Yi Li |
| collection | DOAJ |
| description | A fluid model of the magnetized sheath has been built using ion motion equation, ion continuity equation, Poisson's equation, and Boltzmann's relationship of electron for plasma-based low-energy ion implantation (PBLEII) inner surface modification of a tube. Along the central axis from the middle piece to the end, the maximum ion impact energy decreases from 1600 to 400 eV, the maximum ion impact angle increases from 7° to 60°, and an implantation dose peak of about twice as much as other place appears near the nozzle. The implantation dose just can compensate for the ion impact energy and angle because the mass transfer mechanism of PBLEII is thermal diffusion and low-energy ion implantation. The uniformity of the modification effect is acceptable along the axial direction of the tube. |
| first_indexed | 2024-12-19T07:56:26Z |
| format | Article |
| id | doaj.art-d16d6d01c9114de2b15f99fe63f6b440 |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-19T07:56:26Z |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-d16d6d01c9114de2b15f99fe63f6b4402022-12-21T20:30:00ZengIEEEIEEE Access2169-35362019-01-017531475315110.1109/ACCESS.2019.29126378695700Numerical Analysis of Magnetized Sheath for Inner Surface ModificationYi Li0https://orcid.org/0000-0003-4473-4797Xiaodan Jing1Quan Yuan2Jiuhui Li3College of Science, Liaoning University of Technology, Jinzhou, ChinaCollege of Science, Liaoning University of Technology, Jinzhou, ChinaCollege of Science, Liaoning University of Technology, Jinzhou, ChinaCollege of Science, Liaoning University of Technology, Jinzhou, ChinaA fluid model of the magnetized sheath has been built using ion motion equation, ion continuity equation, Poisson's equation, and Boltzmann's relationship of electron for plasma-based low-energy ion implantation (PBLEII) inner surface modification of a tube. Along the central axis from the middle piece to the end, the maximum ion impact energy decreases from 1600 to 400 eV, the maximum ion impact angle increases from 7° to 60°, and an implantation dose peak of about twice as much as other place appears near the nozzle. The implantation dose just can compensate for the ion impact energy and angle because the mass transfer mechanism of PBLEII is thermal diffusion and low-energy ion implantation. The uniformity of the modification effect is acceptable along the axial direction of the tube.https://ieeexplore.ieee.org/document/8695700/Inner surface modificationmagnetized sheathfluid modelplasma-based low-energy ion implantation (PBLEII) |
| spellingShingle | Yi Li Xiaodan Jing Quan Yuan Jiuhui Li Numerical Analysis of Magnetized Sheath for Inner Surface Modification IEEE Access Inner surface modification magnetized sheath fluid model plasma-based low-energy ion implantation (PBLEII) |
| title | Numerical Analysis of Magnetized Sheath for Inner Surface Modification |
| title_full | Numerical Analysis of Magnetized Sheath for Inner Surface Modification |
| title_fullStr | Numerical Analysis of Magnetized Sheath for Inner Surface Modification |
| title_full_unstemmed | Numerical Analysis of Magnetized Sheath for Inner Surface Modification |
| title_short | Numerical Analysis of Magnetized Sheath for Inner Surface Modification |
| title_sort | numerical analysis of magnetized sheath for inner surface modification |
| topic | Inner surface modification magnetized sheath fluid model plasma-based low-energy ion implantation (PBLEII) |
| url | https://ieeexplore.ieee.org/document/8695700/ |
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