Numerical Analysis of Magnetized Sheath for Inner Surface Modification

Numerical Analysis of Magnetized Sheath for Inner Surface Modification

A fluid model of the magnetized sheath has been built using ion motion equation, ion continuity equation, Poisson's equation, and Boltzmann's relationship of electron for plasma-based low-energy ion implantation (PBLEII) inner surface modification of a tube. Along the central axis from the...

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Bibliographic Details
Main Authors: Yi Li, Xiaodan Jing, Quan Yuan, Jiuhui Li
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Inner surface modification
magnetized sheath
fluid model
plasma-based low-energy ion implantation (PBLEII)
Online Access:https://ieeexplore.ieee.org/document/8695700/

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