One-Stage Formation of Two-Dimensional Photonic Crystal and Spatially Ordered Arrays of Self-Assembled Ge(Si) Nanoislandson Pit-Patterned Silicon-On-Insulator Substrate

A new approach to improve the light-emitting efficiency of Ge(Si) quantum dots (QDs) by the formation of an ordered array of QDs on a pit-patterned silicon-on-insulator (SOI) substrate is presented. This approach makes it possible to use the same pre-patterned substrate both for the growth of spatia...

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Bibliographic Details
Main Authors: Alexey V. Novikov, Zhanna V. Smagina, Margarita V. Stepikhova, Vladimir A. Zinovyev, Sergey A. Rudin, Sergey A. Dyakov, Ekaterina E. Rodyakina, Alexey V. Nenashev, Sergey M. Sergeev, Artem V. Peretokin, Anatoly V. Dvurechenskii
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/4/909

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