MOVPE Technology of Fe-Compensated In PLayers for the Quantum Cascade Laser Applications
Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulat...
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| Format: | Article |
| Language: | English |
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Polish Academy of Sciences
2020-06-01
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| Series: | International Journal of Electronics and Telecommunications |
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| Online Access: | https://journals.pan.pl/Content/115217/PDF/53_2020.pdf |
| Summary: | Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulating layer on top of the QCL. Present work describes consequent steps of elaboration of MOVPE technology of Fe-compensated InP layers for further applications in quantum cascade lasers. |
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| ISSN: | 2081-8491 2300-1933 |