The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a...

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Main Authors: Yunbo Shi, Zhicai Yang, Zongmin Ma, Huiliang Cao, Zhiwei Kou, Dan Zhi, Yanxiang Chen, Hengzhen Feng, Jun Liu
Format: Article
Language:English
Published: MDPI AG 2016-06-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/16/6/840
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author Yunbo Shi
Zhicai Yang
Zongmin Ma
Huiliang Cao
Zhiwei Kou
Dan Zhi
Yanxiang Chen
Hengzhen Feng
Jun Liu
author_facet Yunbo Shi
Zhicai Yang
Zongmin Ma
Huiliang Cao
Zhiwei Kou
Dan Zhi
Yanxiang Chen
Hengzhen Feng
Jun Liu
author_sort Yunbo Shi
collection DOAJ
description Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.
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spelling doaj.art-d1d5a502690846a88e1be970bb1e0ec72022-12-22T04:22:16ZengMDPI AGSensors1424-82202016-06-0116684010.3390/s16060840s16060840The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) AccelerometerYunbo Shi0Zhicai Yang1Zongmin Ma2Huiliang Cao3Zhiwei Kou4Dan Zhi5Yanxiang Chen6Hengzhen Feng7Jun Liu8Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaScience and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, ChinaDespite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.http://www.mdpi.com/1424-8220/16/6/840dual-warhead Hopkinson barlaser interferometerdynamic linearityaccelerometermeasurement
spellingShingle Yunbo Shi
Zhicai Yang
Zongmin Ma
Huiliang Cao
Zhiwei Kou
Dan Zhi
Yanxiang Chen
Hengzhen Feng
Jun Liu
The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
Sensors
dual-warhead Hopkinson bar
laser interferometer
dynamic linearity
accelerometer
measurement
title The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
title_full The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
title_fullStr The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
title_full_unstemmed The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
title_short The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer
title_sort development of a dual warhead impact system for dynamic linearity measurement of a high g micro electro mechanical systems mems accelerometer
topic dual-warhead Hopkinson bar
laser interferometer
dynamic linearity
accelerometer
measurement
url http://www.mdpi.com/1424-8220/16/6/840
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