Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes
A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispheri...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-07-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/7/815 |
| _version_ | 1797526613977464832 |
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| author | Renxin Wang Bing Bai Wendong Zhang Huiliang Cao Jun Liu |
| author_facet | Renxin Wang Bing Bai Wendong Zhang Huiliang Cao Jun Liu |
| author_sort | Renxin Wang |
| collection | DOAJ |
| description | A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications. |
| first_indexed | 2024-03-10T09:31:51Z |
| format | Article |
| id | doaj.art-d1d98658229b444096cf38177b818597 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T09:31:51Z |
| publishDate | 2021-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-d1d98658229b444096cf38177b8185972023-11-22T04:24:58ZengMDPI AGMicromachines2072-666X2021-07-0112781510.3390/mi12070815Manufacture of Hemispherical Shell and Surrounding Eave-Shaped ElectrodesRenxin Wang0Bing Bai1Wendong Zhang2Huiliang Cao3Jun Liu4State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaState Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, ChinaA hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications.https://www.mdpi.com/2072-666X/12/7/815hemispheric shelleave-shaped electrodesblowingnondestructive estimationasymmetrysurface roughness |
| spellingShingle | Renxin Wang Bing Bai Wendong Zhang Huiliang Cao Jun Liu Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes Micromachines hemispheric shell eave-shaped electrodes blowing nondestructive estimation asymmetry surface roughness |
| title | Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes |
| title_full | Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes |
| title_fullStr | Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes |
| title_full_unstemmed | Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes |
| title_short | Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes |
| title_sort | manufacture of hemispherical shell and surrounding eave shaped electrodes |
| topic | hemispheric shell eave-shaped electrodes blowing nondestructive estimation asymmetry surface roughness |
| url | https://www.mdpi.com/2072-666X/12/7/815 |
| work_keys_str_mv | AT renxinwang manufactureofhemisphericalshellandsurroundingeaveshapedelectrodes AT bingbai manufactureofhemisphericalshellandsurroundingeaveshapedelectrodes AT wendongzhang manufactureofhemisphericalshellandsurroundingeaveshapedelectrodes AT huiliangcao manufactureofhemisphericalshellandsurroundingeaveshapedelectrodes AT junliu manufactureofhemisphericalshellandsurroundingeaveshapedelectrodes |