Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispheri...

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Bibliographic Details
Main Authors: Renxin Wang, Bing Bai, Wendong Zhang, Huiliang Cao, Jun Liu
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Micromachines
Subjects:
hemispheric shell
eave-shaped electrodes
blowing
nondestructive estimation
asymmetry
surface roughness
Online Access:https://www.mdpi.com/2072-666X/12/7/815

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