Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes
A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispheri...
Main Authors: | Renxin Wang, Bing Bai, Wendong Zhang, Huiliang Cao, Jun Liu |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-07-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/7/815 |
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