Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors
Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved thr...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/19/9074 |
| _version_ | 1797516815408037888 |
|---|---|
| author | Chia-Yen Lee Cheng-Xue Yu Kuan-Yu Lin Lung-Ming Fu |
| author_facet | Chia-Yen Lee Cheng-Xue Yu Kuan-Yu Lin Lung-Ming Fu |
| author_sort | Chia-Yen Lee |
| collection | DOAJ |
| description | Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors. |
| first_indexed | 2024-03-10T07:07:05Z |
| format | Article |
| id | doaj.art-d211503c65fc4322b282bd67a0abaf53 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T07:07:05Z |
| publishDate | 2021-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-d211503c65fc4322b282bd67a0abaf532023-11-22T15:47:21ZengMDPI AGApplied Sciences2076-34172021-09-011119907410.3390/app11199074Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared SensorsChia-Yen Lee0Cheng-Xue Yu1Kuan-Yu Lin2Lung-Ming Fu3Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanDepartment of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanDepartment of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanDepartment of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanPyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.https://www.mdpi.com/2076-3417/11/19/9074etchingMEMSpyroelectric infrared sensorsubstrate thickness |
| spellingShingle | Chia-Yen Lee Cheng-Xue Yu Kuan-Yu Lin Lung-Ming Fu Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors Applied Sciences etching MEMS pyroelectric infrared sensor substrate thickness |
| title | Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors |
| title_full | Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors |
| title_fullStr | Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors |
| title_full_unstemmed | Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors |
| title_short | Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors |
| title_sort | effect of substrate thickness on voltage responsivity of mems based zno pyroelectric infrared sensors |
| topic | etching MEMS pyroelectric infrared sensor substrate thickness |
| url | https://www.mdpi.com/2076-3417/11/19/9074 |
| work_keys_str_mv | AT chiayenlee effectofsubstratethicknessonvoltageresponsivityofmemsbasedznopyroelectricinfraredsensors AT chengxueyu effectofsubstratethicknessonvoltageresponsivityofmemsbasedznopyroelectricinfraredsensors AT kuanyulin effectofsubstratethicknessonvoltageresponsivityofmemsbasedznopyroelectricinfraredsensors AT lungmingfu effectofsubstratethicknessonvoltageresponsivityofmemsbasedznopyroelectricinfraredsensors |