Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors

Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors

Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved thr...

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Bibliographic Details
Main Authors:	Chia-Yen Lee, Cheng-Xue Yu, Kuan-Yu Lin, Lung-Ming Fu
Format:	Article
Language:	English
Published:	MDPI AG 2021-09-01
Series:	Applied Sciences
Subjects:	etching MEMS pyroelectric infrared sensor substrate thickness
Online Access:	https://www.mdpi.com/2076-3417/11/19/9074

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