A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure
This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/2/186 |
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| author | Mingwei Chen Anxiang Zhong Yulan Lu Jian Chen Deyong Chen Junbo Wang |
| author_facet | Mingwei Chen Anxiang Zhong Yulan Lu Jian Chen Deyong Chen Junbo Wang |
| author_sort | Mingwei Chen |
| collection | DOAJ |
| description | This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s<sup>2</sup>) at 1 Hz, 0.01–2 Hz, and 1.78 × 10<sup>−8</sup> (rad/s<sup>2</sup>)/Hz<sup>1/2</sup> at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures. |
| first_indexed | 2024-03-09T21:26:04Z |
| format | Article |
| id | doaj.art-d237946437354c319396fe36065df031 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T21:26:04Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-d237946437354c319396fe36065df0312023-11-23T21:09:58ZengMDPI AGMicromachines2072-666X2022-01-0113218610.3390/mi13020186A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode StructureMingwei Chen0Anxiang Zhong1Yulan Lu2Jian Chen3Deyong Chen4Junbo Wang5State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaThis paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s<sup>2</sup>) at 1 Hz, 0.01–2 Hz, and 1.78 × 10<sup>−8</sup> (rad/s<sup>2</sup>)/Hz<sup>1/2</sup> at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures.https://www.mdpi.com/2072-666X/13/2/186angular accelerometerelectrochemical principleMEMSsilicon based three-electrode structurehigh performance |
| spellingShingle | Mingwei Chen Anxiang Zhong Yulan Lu Jian Chen Deyong Chen Junbo Wang A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure Micromachines angular accelerometer electrochemical principle MEMS silicon based three-electrode structure high performance |
| title | A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure |
| title_full | A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure |
| title_fullStr | A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure |
| title_full_unstemmed | A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure |
| title_short | A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure |
| title_sort | mems electrochemical angular accelerometer leveraging silicon based three electrode structure |
| topic | angular accelerometer electrochemical principle MEMS silicon based three-electrode structure high performance |
| url | https://www.mdpi.com/2072-666X/13/2/186 |
| work_keys_str_mv | AT mingweichen amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT anxiangzhong amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT yulanlu amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT jianchen amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT deyongchen amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT junbowang amemselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT mingweichen memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT anxiangzhong memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT yulanlu memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT jianchen memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT deyongchen memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure AT junbowang memselectrochemicalangularaccelerometerleveragingsiliconbasedthreeelectrodestructure |