A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the...

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Bibliographic Details
Main Authors: Mingwei Chen, Anxiang Zhong, Yulan Lu, Jian Chen, Deyong Chen, Junbo Wang
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
angular accelerometer
electrochemical principle
MEMS
silicon based three-electrode structure
high performance
Online Access:https://www.mdpi.com/2072-666X/13/2/186

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