Construction of liquid metal-based soft microfluidic sensors via soft lithography

Abstract Background Liquid metal (LM) can be integrated into microfluidic channel, bringing new functionalities of microfluidics and opening a new window for soft microfluidic electronics, due to the superior advantages of the conductivity and deformability of LMs. However, patterning the LMs into m...

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Main Authors: Yang Zhang, Haowei Duan, Guoqiang Li, Maoyu Peng, Xing Ma, Ming Li, Sheng Yan
Format: Article
Language:English
Published: BMC 2022-05-01
Series:Journal of Nanobiotechnology
Subjects:
Online Access:https://doi.org/10.1186/s12951-022-01471-0
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author Yang Zhang
Haowei Duan
Guoqiang Li
Maoyu Peng
Xing Ma
Ming Li
Sheng Yan
author_facet Yang Zhang
Haowei Duan
Guoqiang Li
Maoyu Peng
Xing Ma
Ming Li
Sheng Yan
author_sort Yang Zhang
collection DOAJ
description Abstract Background Liquid metal (LM) can be integrated into microfluidic channel, bringing new functionalities of microfluidics and opening a new window for soft microfluidic electronics, due to the superior advantages of the conductivity and deformability of LMs. However, patterning the LMs into microfluidic channels requires either selective surface wetting or complex fabrication process. Results In this work, we develop a method to pattern the LMs onto the soft elastomer via soft lithographic process for fabrication of soft microfluidic sensors without the surface modification, bulky facilities, and complicated processes. The combination of the interfacial hydrogen bond and surface tension enables the LM patterns transfer to the soft elastomer. The transferred LM patterns with an ellipse-like cross-section further improve the stability under the mechanical deformation. Three proof-of-concept experiments were conducted to demonstrate the utilization of this method for development of thermochromic sensors, self-powered capacity sensors and flexible biosensor for glucose detection. Conclusions In summary, the proposed method offers a new patterning method to obtain soft microfluidic sensors and brings new possibilities for microfluidics-related wearable devices. Graphical Abstract
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spelling doaj.art-d32a0a6a7594472bbfec01ba77e485f12022-12-22T02:18:26ZengBMCJournal of Nanobiotechnology1477-31552022-05-0120111510.1186/s12951-022-01471-0Construction of liquid metal-based soft microfluidic sensors via soft lithographyYang Zhang0Haowei Duan1Guoqiang Li2Maoyu Peng3Xing Ma4Ming Li5Sheng Yan6Institute for Advanced Study, Shenzhen UniversitySchool of Engineering, Macquarie UniversitySauvage Laboratory for Smart Materials, Harbin Institute of Technology (Shenzhen)Institute for Advanced Study, Shenzhen UniversitySauvage Laboratory for Smart Materials, Harbin Institute of Technology (Shenzhen)School of Engineering, Macquarie UniversityInstitute for Advanced Study, Shenzhen UniversityAbstract Background Liquid metal (LM) can be integrated into microfluidic channel, bringing new functionalities of microfluidics and opening a new window for soft microfluidic electronics, due to the superior advantages of the conductivity and deformability of LMs. However, patterning the LMs into microfluidic channels requires either selective surface wetting or complex fabrication process. Results In this work, we develop a method to pattern the LMs onto the soft elastomer via soft lithographic process for fabrication of soft microfluidic sensors without the surface modification, bulky facilities, and complicated processes. The combination of the interfacial hydrogen bond and surface tension enables the LM patterns transfer to the soft elastomer. The transferred LM patterns with an ellipse-like cross-section further improve the stability under the mechanical deformation. Three proof-of-concept experiments were conducted to demonstrate the utilization of this method for development of thermochromic sensors, self-powered capacity sensors and flexible biosensor for glucose detection. Conclusions In summary, the proposed method offers a new patterning method to obtain soft microfluidic sensors and brings new possibilities for microfluidics-related wearable devices. Graphical Abstracthttps://doi.org/10.1186/s12951-022-01471-0MicrofluidicsBiosensorsLiquid metalSoft electronics
spellingShingle Yang Zhang
Haowei Duan
Guoqiang Li
Maoyu Peng
Xing Ma
Ming Li
Sheng Yan
Construction of liquid metal-based soft microfluidic sensors via soft lithography
Journal of Nanobiotechnology
Microfluidics
Biosensors
Liquid metal
Soft electronics
title Construction of liquid metal-based soft microfluidic sensors via soft lithography
title_full Construction of liquid metal-based soft microfluidic sensors via soft lithography
title_fullStr Construction of liquid metal-based soft microfluidic sensors via soft lithography
title_full_unstemmed Construction of liquid metal-based soft microfluidic sensors via soft lithography
title_short Construction of liquid metal-based soft microfluidic sensors via soft lithography
title_sort construction of liquid metal based soft microfluidic sensors via soft lithography
topic Microfluidics
Biosensors
Liquid metal
Soft electronics
url https://doi.org/10.1186/s12951-022-01471-0
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AT maoyupeng constructionofliquidmetalbasedsoftmicrofluidicsensorsviasoftlithography
AT xingma constructionofliquidmetalbasedsoftmicrofluidicsensorsviasoftlithography
AT mingli constructionofliquidmetalbasedsoftmicrofluidicsensorsviasoftlithography
AT shengyan constructionofliquidmetalbasedsoftmicrofluidicsensorsviasoftlithography