Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range
This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designe...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4902018 |
| _version_ | 1818756051306020864 |
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| author | Ting-Wei Liu Yao-Chuan Tsai Yu-Ching Lin Takahito Ono Shuji Tanaka Tsung-Tsong Wu |
| author_facet | Ting-Wei Liu Yao-Chuan Tsai Yu-Ching Lin Takahito Ono Shuji Tanaka Tsung-Tsong Wu |
| author_sort | Ting-Wei Liu |
| collection | DOAJ |
| description | This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated. |
| first_indexed | 2024-12-18T05:48:53Z |
| format | Article |
| id | doaj.art-d448e5875b7b4b3293607a775aa69cb8 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-18T05:48:53Z |
| publishDate | 2014-12-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-d448e5875b7b4b3293607a775aa69cb82022-12-21T21:18:59ZengAIP Publishing LLCAIP Advances2158-32262014-12-01412124201124201-1110.1063/1.4902018006497ADVDesign and fabrication of a phononic-crystal-based Love wave resonator in GHz rangeTing-Wei Liu0Yao-Chuan Tsai1Yu-Ching Lin2Takahito Ono3Shuji Tanaka4Tsung-Tsong Wu5Inst. of Applied Mechanics, National Taiwan Univ., Taipei, TaiwanWPI-AIMR, Tohoku Univ., Sendai, JapanWPI-AIMR, Tohoku Univ., Sendai, JapanDept. of Mechanical Engineering, Tohoku Univ., Sendai, JapanDept. of Mechanical Engineering, Tohoku Univ., Sendai, JapanInst. of Applied Mechanics, National Taiwan Univ., Taipei, TaiwanThis paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated.http://dx.doi.org/10.1063/1.4902018 |
| spellingShingle | Ting-Wei Liu Yao-Chuan Tsai Yu-Ching Lin Takahito Ono Shuji Tanaka Tsung-Tsong Wu Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range AIP Advances |
| title | Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range |
| title_full | Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range |
| title_fullStr | Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range |
| title_full_unstemmed | Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range |
| title_short | Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range |
| title_sort | design and fabrication of a phononic crystal based love wave resonator in ghz range |
| url | http://dx.doi.org/10.1063/1.4902018 |
| work_keys_str_mv | AT tingweiliu designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange AT yaochuantsai designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange AT yuchinglin designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange AT takahitoono designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange AT shujitanaka designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange AT tsungtsongwu designandfabricationofaphononiccrystalbasedlovewaveresonatoringhzrange |