High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass
Glass is an alternative solution to polymer for the fabrication of three-dimensional (3D) microfluidic biochips. Femtosecond (fs) lasers are nowadays the most promising tools for transparent glass processing. Specifically, the multiphoton process induced by fs pulses enables fabrication of embedded...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-07-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2079-4991/8/8/583 |
| _version_ | 1818253764028530688 |
|---|---|
| author | Florin Jipa Stefana Iosub Bogdan Calin Emanuel Axente Felix Sima Koji Sugioka |
| author_facet | Florin Jipa Stefana Iosub Bogdan Calin Emanuel Axente Felix Sima Koji Sugioka |
| author_sort | Florin Jipa |
| collection | DOAJ |
| description | Glass is an alternative solution to polymer for the fabrication of three-dimensional (3D) microfluidic biochips. Femtosecond (fs) lasers are nowadays the most promising tools for transparent glass processing. Specifically, the multiphoton process induced by fs pulses enables fabrication of embedded 3D channels with high precision. The subtractive fabrication process creating 3D hollow structures in glass, known as fs laser-assisted etching (FLAE), is based on selective removal of the laser-modified regions by successive chemical etching in diluted hydrofluoric acid solutions. In this work we demonstrate the possibility to generate embedded hollow channels in photosensitive Foturan glass volume by high repetition rate picosecond (ps) laser-assisted etching (PLAE). In particular, the influence of the critical irradiation doses and etching rates are discussed in comparison of two different wavelengths of ultraviolet (355 nm) and visible (532 nm) ranges. Fast and controlled fabrication of a basic structure composed of an embedded micro-channel connected with two open reservoirs, commonly used in the biochip design, are achieved inside glass. Distinct advantages such as good aspect-ratio, reduced processing time for large areas, and lower fabrication cost are evidenced. |
| first_indexed | 2024-12-12T16:45:15Z |
| format | Article |
| id | doaj.art-d47f9c493a574e099a90ccdd964da201 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-12-12T16:45:15Z |
| publishDate | 2018-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-d47f9c493a574e099a90ccdd964da2012022-12-22T00:18:30ZengMDPI AGNanomaterials2079-49912018-07-018858310.3390/nano8080583nano8080583High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive GlassFlorin Jipa0Stefana Iosub1Bogdan Calin2Emanuel Axente3Felix Sima4Koji Sugioka5Center for Advanced Laser Technologies (CETAL), National Institute for Laser, Plasma and Radiation Physics (INFLPR), 409 Atomistilor, Magurele RO-77125, RomaniaCenter for Advanced Laser Technologies (CETAL), National Institute for Laser, Plasma and Radiation Physics (INFLPR), 409 Atomistilor, Magurele RO-77125, RomaniaCenter for Advanced Laser Technologies (CETAL), National Institute for Laser, Plasma and Radiation Physics (INFLPR), 409 Atomistilor, Magurele RO-77125, RomaniaCenter for Advanced Laser Technologies (CETAL), National Institute for Laser, Plasma and Radiation Physics (INFLPR), 409 Atomistilor, Magurele RO-77125, RomaniaCenter for Advanced Laser Technologies (CETAL), National Institute for Laser, Plasma and Radiation Physics (INFLPR), 409 Atomistilor, Magurele RO-77125, RomaniaRIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, JapanGlass is an alternative solution to polymer for the fabrication of three-dimensional (3D) microfluidic biochips. Femtosecond (fs) lasers are nowadays the most promising tools for transparent glass processing. Specifically, the multiphoton process induced by fs pulses enables fabrication of embedded 3D channels with high precision. The subtractive fabrication process creating 3D hollow structures in glass, known as fs laser-assisted etching (FLAE), is based on selective removal of the laser-modified regions by successive chemical etching in diluted hydrofluoric acid solutions. In this work we demonstrate the possibility to generate embedded hollow channels in photosensitive Foturan glass volume by high repetition rate picosecond (ps) laser-assisted etching (PLAE). In particular, the influence of the critical irradiation doses and etching rates are discussed in comparison of two different wavelengths of ultraviolet (355 nm) and visible (532 nm) ranges. Fast and controlled fabrication of a basic structure composed of an embedded micro-channel connected with two open reservoirs, commonly used in the biochip design, are achieved inside glass. Distinct advantages such as good aspect-ratio, reduced processing time for large areas, and lower fabrication cost are evidenced.http://www.mdpi.com/2079-4991/8/8/583picosecond laser processing3D microfluidic channelsphotosensitive glass |
| spellingShingle | Florin Jipa Stefana Iosub Bogdan Calin Emanuel Axente Felix Sima Koji Sugioka High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass Nanomaterials picosecond laser processing 3D microfluidic channels photosensitive glass |
| title | High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass |
| title_full | High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass |
| title_fullStr | High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass |
| title_full_unstemmed | High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass |
| title_short | High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass |
| title_sort | high repetition rate uv versus vis picosecond laser fabrication of 3d microfluidic channels embedded in photosensitive glass |
| topic | picosecond laser processing 3D microfluidic channels photosensitive glass |
| url | http://www.mdpi.com/2079-4991/8/8/583 |
| work_keys_str_mv | AT florinjipa highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass AT stefanaiosub highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass AT bogdancalin highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass AT emanuelaxente highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass AT felixsima highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass AT kojisugioka highrepetitionrateuvversusvispicosecondlaserfabricationof3dmicrofluidicchannelsembeddedinphotosensitiveglass |