An Optical MEMS Acoustic Sensor Based on Grating Interferometer
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/7/1503 |
| _version_ | 1811306591930023936 |
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| author | Mengying Zhang Gaomi Wu Dipeng Ren Ran Gao Zhi-Mei Qi Xingdong Liang |
| author_facet | Mengying Zhang Gaomi Wu Dipeng Ren Ran Gao Zhi-Mei Qi Xingdong Liang |
| author_sort | Mengying Zhang |
| collection | DOAJ |
| description | Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C. |
| first_indexed | 2024-04-13T08:48:10Z |
| format | Article |
| id | doaj.art-d4c2cb3ffcdf45579c59ddf259019f97 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:48:10Z |
| publishDate | 2019-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-d4c2cb3ffcdf45579c59ddf259019f972022-12-22T02:53:37ZengMDPI AGSensors1424-82202019-03-01197150310.3390/s19071503s19071503An Optical MEMS Acoustic Sensor Based on Grating InterferometerMengying Zhang0Gaomi Wu1Dipeng Ren2Ran Gao3Zhi-Mei Qi4Xingdong Liang5State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaScience and Technology on Microwave Imaging Laboratory, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, ChinaAcoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C.https://www.mdpi.com/1424-8220/19/7/1503MEMSacoustic sensorsgratinginterferometrystability |
| spellingShingle | Mengying Zhang Gaomi Wu Dipeng Ren Ran Gao Zhi-Mei Qi Xingdong Liang An Optical MEMS Acoustic Sensor Based on Grating Interferometer Sensors MEMS acoustic sensors grating interferometry stability |
| title | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
| title_full | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
| title_fullStr | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
| title_full_unstemmed | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
| title_short | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
| title_sort | optical mems acoustic sensor based on grating interferometer |
| topic | MEMS acoustic sensors grating interferometry stability |
| url | https://www.mdpi.com/1424-8220/19/7/1503 |
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