An Optical MEMS Acoustic Sensor Based on Grating Interferometer

An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...

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Bibliographic Details
Main Authors: Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhi-Mei Qi, Xingdong Liang
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Sensors
Subjects:
MEMS
acoustic sensors
grating
interferometry
stability
Online Access:https://www.mdpi.com/1424-8220/19/7/1503

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