Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD...
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| Format: | Article |
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MDPI AG
2023-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/2/568 |
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| author | Hiroaki Satoh Koki Isogai Shohei Iwata Taiki Aso Ryosuke Hayashi Shu Takeuchi Hiroshi Inokawa |
| author_facet | Hiroaki Satoh Koki Isogai Shohei Iwata Taiki Aso Ryosuke Hayashi Shu Takeuchi Hiroshi Inokawa |
| author_sort | Hiroaki Satoh |
| collection | DOAJ |
| description | This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10<sup>−5</sup> RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process. |
| first_indexed | 2024-03-09T11:19:35Z |
| format | Article |
| id | doaj.art-d4cb8c8db24c414cb5068c300b8ea760 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T11:19:35Z |
| publishDate | 2023-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-d4cb8c8db24c414cb5068c300b8ea7602023-12-01T00:23:49ZengMDPI AGSensors1424-82202023-01-0123256810.3390/s23020568Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical BiosensorHiroaki Satoh0Koki Isogai1Shohei Iwata2Taiki Aso3Ryosuke Hayashi4Shu Takeuchi5Hiroshi Inokawa6Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanResearch Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanResearch Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanThis paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10<sup>−5</sup> RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process.https://www.mdpi.com/1424-8220/23/2/568optical biosensorsensor integrationrefractive index measurementlabel-free biosensingSOI photodiodesurface plasmon antenna |
| spellingShingle | Hiroaki Satoh Koki Isogai Shohei Iwata Taiki Aso Ryosuke Hayashi Shu Takeuchi Hiroshi Inokawa Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor Sensors optical biosensor sensor integration refractive index measurement label-free biosensing SOI photodiode surface plasmon antenna |
| title | Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor |
| title_full | Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor |
| title_fullStr | Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor |
| title_full_unstemmed | Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor |
| title_short | Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor |
| title_sort | refractive index measurement using soi photodiode with sp antenna toward soi cmos compatible integrated optical biosensor |
| topic | optical biosensor sensor integration refractive index measurement label-free biosensing SOI photodiode surface plasmon antenna |
| url | https://www.mdpi.com/1424-8220/23/2/568 |
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