Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor

This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD...

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Main Authors: Hiroaki Satoh, Koki Isogai, Shohei Iwata, Taiki Aso, Ryosuke Hayashi, Shu Takeuchi, Hiroshi Inokawa
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/2/568
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author Hiroaki Satoh
Koki Isogai
Shohei Iwata
Taiki Aso
Ryosuke Hayashi
Shu Takeuchi
Hiroshi Inokawa
author_facet Hiroaki Satoh
Koki Isogai
Shohei Iwata
Taiki Aso
Ryosuke Hayashi
Shu Takeuchi
Hiroshi Inokawa
author_sort Hiroaki Satoh
collection DOAJ
description This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10<sup>−5</sup> RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process.
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spelling doaj.art-d4cb8c8db24c414cb5068c300b8ea7602023-12-01T00:23:49ZengMDPI AGSensors1424-82202023-01-0123256810.3390/s23020568Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical BiosensorHiroaki Satoh0Koki Isogai1Shohei Iwata2Taiki Aso3Ryosuke Hayashi4Shu Takeuchi5Hiroshi Inokawa6Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanDepartment of Engineering, Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8561, JapanResearch Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanResearch Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, JapanThis paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10<sup>−5</sup> RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process.https://www.mdpi.com/1424-8220/23/2/568optical biosensorsensor integrationrefractive index measurementlabel-free biosensingSOI photodiodesurface plasmon antenna
spellingShingle Hiroaki Satoh
Koki Isogai
Shohei Iwata
Taiki Aso
Ryosuke Hayashi
Shu Takeuchi
Hiroshi Inokawa
Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
Sensors
optical biosensor
sensor integration
refractive index measurement
label-free biosensing
SOI photodiode
surface plasmon antenna
title Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_full Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_fullStr Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_full_unstemmed Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_short Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_sort refractive index measurement using soi photodiode with sp antenna toward soi cmos compatible integrated optical biosensor
topic optical biosensor
sensor integration
refractive index measurement
label-free biosensing
SOI photodiode
surface plasmon antenna
url https://www.mdpi.com/1424-8220/23/2/568
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