Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor

Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor

This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD...

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Bibliographic Details
Main Authors: Hiroaki Satoh, Koki Isogai, Shohei Iwata, Taiki Aso, Ryosuke Hayashi, Shu Takeuchi, Hiroshi Inokawa
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Sensors
Subjects:
optical biosensor
sensor integration
refractive index measurement
label-free biosensing
SOI photodiode
surface plasmon antenna
Online Access:https://www.mdpi.com/1424-8220/23/2/568

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