Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry
The existing analytical gradient models in phase measuring deflectometry (PMD) usually suffer in the ambiguous problem. To solve this problem, simplification/assumption is often given to the surface shape, which causes non-ignorable measurement error in certain situations. In order to analyze the re...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2018-12-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379718319430 |
| _version_ | 1819274092861194240 |
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| author | Huimin Yue Yuxiang Wu Mingyang Li Yong Liu |
| author_facet | Huimin Yue Yuxiang Wu Mingyang Li Yong Liu |
| author_sort | Huimin Yue |
| collection | DOAJ |
| description | The existing analytical gradient models in phase measuring deflectometry (PMD) usually suffer in the ambiguous problem. To solve this problem, simplification/assumption is often given to the surface shape, which causes non-ignorable measurement error in certain situations. In order to analyze the relation between the surface shape and measurement error when simplification/assumption is used, a ray tracing simulation model is developed in this paper. For any given PMD system setup, the relation between the height/slope variations of test surface and measurement accuracy can be carried out. The corresponding experiment work proves the correctness of this simulation model. The increasing of either the height or slope of object will lead to the exponential aggravating of measurement error. For our experiment setup, the measurement gradient error will be less than 0.5% if the ratio of the distance between the LCD (Liquid Crystal Display) screen and the reference plane and the STD (standard derivation) of object height is larger than 200. Keywords: Phase measuring deflectometry, Optical 3D measurement, Error analysis, Ray tracing model |
| first_indexed | 2024-12-23T23:02:56Z |
| format | Article |
| id | doaj.art-d4f83e971c1b4f029e718c38d2075285 |
| institution | Directory Open Access Journal |
| issn | 2211-3797 |
| language | English |
| last_indexed | 2024-12-23T23:02:56Z |
| publishDate | 2018-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Physics |
| spelling | doaj.art-d4f83e971c1b4f029e718c38d20752852022-12-21T17:26:52ZengElsevierResults in Physics2211-37972018-12-0111994998Study on the measurement error and scope of analytical gradient model in phase measuring deflectometryHuimin Yue0Yuxiang Wu1Mingyang Li2Yong Liu3University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu 610054, ChinaUniversity of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu 610054, China; Xidian University, School of Physics and Optoelectronic Engineering, No. 2 South Taibai Road, Xi’an, Shaanxi 710071, China; Corresponding author at: Xidian University, School of Physics and Optoelectronic Engineering, No. 2 South Taibai Road, Xi’an, Shaanxi 710071, China.University of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu 610054, ChinaUniversity of Electronic Science and Technology of China, School of Optoelectronic Science and Engineering, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu 610054, ChinaThe existing analytical gradient models in phase measuring deflectometry (PMD) usually suffer in the ambiguous problem. To solve this problem, simplification/assumption is often given to the surface shape, which causes non-ignorable measurement error in certain situations. In order to analyze the relation between the surface shape and measurement error when simplification/assumption is used, a ray tracing simulation model is developed in this paper. For any given PMD system setup, the relation between the height/slope variations of test surface and measurement accuracy can be carried out. The corresponding experiment work proves the correctness of this simulation model. The increasing of either the height or slope of object will lead to the exponential aggravating of measurement error. For our experiment setup, the measurement gradient error will be less than 0.5% if the ratio of the distance between the LCD (Liquid Crystal Display) screen and the reference plane and the STD (standard derivation) of object height is larger than 200. Keywords: Phase measuring deflectometry, Optical 3D measurement, Error analysis, Ray tracing modelhttp://www.sciencedirect.com/science/article/pii/S2211379718319430 |
| spellingShingle | Huimin Yue Yuxiang Wu Mingyang Li Yong Liu Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry Results in Physics |
| title | Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| title_full | Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| title_fullStr | Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| title_full_unstemmed | Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| title_short | Study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| title_sort | study on the measurement error and scope of analytical gradient model in phase measuring deflectometry |
| url | http://www.sciencedirect.com/science/article/pii/S2211379718319430 |
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