Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime

Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime

In this study, we investigate the damping phenomena acting on piezoelectrically driven MEMS oscillators. Three different geometrical shapes of MEMS oscillators are presented, including cantilevers, bending oscillators, and paddle oscillators. An analytical model for their resonance frequencies is de...

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Bibliographic Details
Main Authors: Tobias Zengerle, Abdallah Ababneh, Helmut Seidel
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Eng
Subjects:
<i>Q</i> factor
damping model
transitional flow regime
viscous flow regime
MEMS oscillator
bending modes
Online Access:https://www.mdpi.com/2673-4117/3/1/11

Internet

https://www.mdpi.com/2673-4117/3/1/11

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