Research on the influence of stamping materials on resist flow and the residual layer in thermal nanoimprint lithography
Abstract Various stamp materials can significantly affect the filling quality of nanoimprint lithography (NIL). The effects of different stamp materials on the imprinting process were investigated from the angles of residual layer (RL) thickness, contact pressure, and filling proportion. The selecti...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2023-09-01
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| Series: | Micro & Nano Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1049/mna2.12175 |