State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration

State Space System Identification of 3-Degree-of-Freedom (DOF) Piezo-Actuator-Driven Stages with Unknown Configuration

Due to their fast response, high accuracy and non-friction force, piezo-actuators have been widely employed in multiple degree-of-freedom (DOF) stages for various nano-positioning applications. The use of flexible hinges in these piezo-actuator-driven stages allows the elimination of the influence o...

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Bibliographic Details
Main Authors: Yu Cao, Xiongbiao Chen
Format: Article
Language:English
Published: MDPI AG 2013-03-01
Series:Actuators
Subjects:
cross-coupling
dynamics
Hankel matrix
state space model
system identification
Online Access:http://www.mdpi.com/2076-0825/2/1/1

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