High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment

Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-eff...

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Main Authors: Marcos Valentim Ribeiro dos Santos, Alvaro José Damião, Antonio Jorge Abdalla
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2022-02-01
Series:Materials Research
Subjects:
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=en
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author Marcos Valentim Ribeiro dos Santos
Alvaro José Damião
Antonio Jorge Abdalla
author_facet Marcos Valentim Ribeiro dos Santos
Alvaro José Damião
Antonio Jorge Abdalla
author_sort Marcos Valentim Ribeiro dos Santos
collection DOAJ
description Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.
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publishDate 2022-02-01
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spelling doaj.art-d630db96ef734034bdccdaef719b6c802022-12-22T01:40:16ZengAssociação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)Materials Research1516-14392022-02-012510.1590/1980-5373-mr-2021-0422High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional EquipmentMarcos Valentim Ribeiro dos Santoshttps://orcid.org/0000-0002-2074-6323Alvaro José DamiãoAntonio Jorge AbdallaAbstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=enSilicon carbidemachiningpolishingroughnessoptical figure
spellingShingle Marcos Valentim Ribeiro dos Santos
Alvaro José Damião
Antonio Jorge Abdalla
High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
Materials Research
Silicon carbide
machining
polishing
roughness
optical figure
title High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_full High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_fullStr High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_full_unstemmed High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_short High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
title_sort high quality finishing process for silicon carbide optical components using conventional equipment
topic Silicon carbide
machining
polishing
roughness
optical figure
url http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=en
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AT antoniojorgeabdalla highqualityfinishingprocessforsiliconcarbideopticalcomponentsusingconventionalequipment