High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-eff...
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Format: | Article |
Language: | English |
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Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
2022-02-01
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Series: | Materials Research |
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Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=en |
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author | Marcos Valentim Ribeiro dos Santos Alvaro José Damião Antonio Jorge Abdalla |
author_facet | Marcos Valentim Ribeiro dos Santos Alvaro José Damião Antonio Jorge Abdalla |
author_sort | Marcos Valentim Ribeiro dos Santos |
collection | DOAJ |
description | Abstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time. |
first_indexed | 2024-12-10T17:12:46Z |
format | Article |
id | doaj.art-d630db96ef734034bdccdaef719b6c80 |
institution | Directory Open Access Journal |
issn | 1516-1439 |
language | English |
last_indexed | 2024-12-10T17:12:46Z |
publishDate | 2022-02-01 |
publisher | Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) |
record_format | Article |
series | Materials Research |
spelling | doaj.art-d630db96ef734034bdccdaef719b6c802022-12-22T01:40:16ZengAssociação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)Materials Research1516-14392022-02-012510.1590/1980-5373-mr-2021-0422High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional EquipmentMarcos Valentim Ribeiro dos Santoshttps://orcid.org/0000-0002-2074-6323Alvaro José DamiãoAntonio Jorge AbdallaAbstract The development of low-cost high quality surface finishing methods for silicon carbide (SiC) is an arduous task. Nowadays, the SiC mirrors manufacture involves extensive, complex, and costly finishing processes carried out on highly expensive ultra-precise machines. In this work, a cost-effective surface finishing method has been successfully developed, using conventional machines for the optical finishing of SiC. The results showed that the combination of ductile grinding and polishing in conventional low-cost machines allowed to obtain high-quality surface finish on SiC substrates with low roughness (4 - 10 nm Ra ) and optical figure in the range λ / 4 - λ / 8, at a reduced 32 hours total processing time.http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=enSilicon carbidemachiningpolishingroughnessoptical figure |
spellingShingle | Marcos Valentim Ribeiro dos Santos Alvaro José Damião Antonio Jorge Abdalla High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment Materials Research Silicon carbide machining polishing roughness optical figure |
title | High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment |
title_full | High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment |
title_fullStr | High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment |
title_full_unstemmed | High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment |
title_short | High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment |
title_sort | high quality finishing process for silicon carbide optical components using conventional equipment |
topic | Silicon carbide machining polishing roughness optical figure |
url | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392022000100281&tlng=en |
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