Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices
Abstract Direct patterning technology holds significant promise owing to its ability to streamline complex patterning processes, fostering affordable design and production of various devices. Direct optical lithographic techniques have recently been applied to diverse ranges of functional inorganic...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2024-01-01
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| Series: | Advanced Physics Research |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/apxr.202300069 |