Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis
Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stabili...
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MDPI AG
2020-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/9/786 |
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| author | Ying Liu Yong Zhang Xin Lin Ke-hong Lv Peng Yang Jing Qiu Guan-jun Liu |
| author_facet | Ying Liu Yong Zhang Xin Lin Ke-hong Lv Peng Yang Jing Qiu Guan-jun Liu |
| author_sort | Ying Liu |
| collection | DOAJ |
| description | Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors. |
| first_indexed | 2024-03-10T17:11:30Z |
| format | Article |
| id | doaj.art-d65e68c507a54c56b04761f10270c7a5 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T17:11:30Z |
| publishDate | 2020-08-01 |
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| series | Micromachines |
| spelling | doaj.art-d65e68c507a54c56b04761f10270c7a52023-11-20T10:39:09ZengMDPI AGMicromachines2072-666X2020-08-0111978610.3390/mi11090786Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect AnalysisYing Liu0Yong Zhang1Xin Lin2Ke-hong Lv3Peng Yang4Jing Qiu5Guan-jun Liu6College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaGraphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors.https://www.mdpi.com/2072-666X/11/9/786pressure sensorgraphenePMMAsealed gas |
| spellingShingle | Ying Liu Yong Zhang Xin Lin Ke-hong Lv Peng Yang Jing Qiu Guan-jun Liu Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis Micromachines pressure sensor graphene PMMA sealed gas |
| title | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
| title_full | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
| title_fullStr | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
| title_full_unstemmed | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
| title_short | Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis |
| title_sort | improved high yield pmma graphene pressure sensor and sealed gas effect analysis |
| topic | pressure sensor graphene PMMA sealed gas |
| url | https://www.mdpi.com/2072-666X/11/9/786 |
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