A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model
Abstract The tactile pressure sensor is of great significance in flexible electronics, but sensitivity customization over the required working range with high linearity still remains a critical challenge. Despite numerous efforts to achieve high sensitivity and a wide working range, most sensitive m...
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2023-01-01
|
| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00477-w |
| _version_ | 1797958675884670976 |
|---|---|
| author | Zhenjin Xu Dezhi Wu Zhiwen Chen Zhongbao Wang Cong Cao Xiangyu Shao Gang Zhou Shaohua Zhang Lingyun Wang Daoheng Sun |
| author_facet | Zhenjin Xu Dezhi Wu Zhiwen Chen Zhongbao Wang Cong Cao Xiangyu Shao Gang Zhou Shaohua Zhang Lingyun Wang Daoheng Sun |
| author_sort | Zhenjin Xu |
| collection | DOAJ |
| description | Abstract The tactile pressure sensor is of great significance in flexible electronics, but sensitivity customization over the required working range with high linearity still remains a critical challenge. Despite numerous efforts to achieve high sensitivity and a wide working range, most sensitive microstructures tend to be obtained only by inverting naturally existing templates without rational design based on fundamental contact principles or models for piezoresistive pressure sensors. Here, a positive design strategy with a hyperelastic model and a Hertzian contact model for comparison was proposed to develop a flexible pressure sensor with highly customizable linear sensitivity and linearity, in which the microstructure distribution was precalculated according to the desired requirement prior to fabrication. As a proof of concept, three flexible pressure sensors exhibited sensitivities of 0.7, 1.0, and 1.3 kPa− 1 over a linear region of up to 200 kPa, with a low sensitivity error (<5%) and high linearity (~0.99), as expected. Based on the superior electromechanical performance of these sensors, potential applications in physiological signal recognition are demonstrated as well, and such a strategy could shed more light on demand-oriented scenarios, including designable working ranges and linear sensitivity for next-generation wearable devices. |
| first_indexed | 2024-04-11T00:22:22Z |
| format | Article |
| id | doaj.art-d6630d2bd22d4ed79da845de9c3975a7 |
| institution | Directory Open Access Journal |
| issn | 2055-7434 |
| language | English |
| last_indexed | 2024-04-11T00:22:22Z |
| publishDate | 2023-01-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj.art-d6630d2bd22d4ed79da845de9c3975a72023-01-08T12:14:32ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342023-01-019111210.1038/s41378-022-00477-wA flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic modelZhenjin Xu0Dezhi Wu1Zhiwen Chen2Zhongbao Wang3Cong Cao4Xiangyu Shao5Gang Zhou6Shaohua Zhang7Lingyun Wang8Daoheng Sun9Department of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityBeijing Key Laboratory of Long-Life Technology of Precise Rotation and Transmission Mechanisms, Beijing Institute of Control EngineeringBeijing Key Laboratory of Long-Life Technology of Precise Rotation and Transmission Mechanisms, Beijing Institute of Control EngineeringDepartment of Mechanical and Electrical Engineering, Xiamen UniversityDepartment of Mechanical and Electrical Engineering, Xiamen UniversityAbstract The tactile pressure sensor is of great significance in flexible electronics, but sensitivity customization over the required working range with high linearity still remains a critical challenge. Despite numerous efforts to achieve high sensitivity and a wide working range, most sensitive microstructures tend to be obtained only by inverting naturally existing templates without rational design based on fundamental contact principles or models for piezoresistive pressure sensors. Here, a positive design strategy with a hyperelastic model and a Hertzian contact model for comparison was proposed to develop a flexible pressure sensor with highly customizable linear sensitivity and linearity, in which the microstructure distribution was precalculated according to the desired requirement prior to fabrication. As a proof of concept, three flexible pressure sensors exhibited sensitivities of 0.7, 1.0, and 1.3 kPa− 1 over a linear region of up to 200 kPa, with a low sensitivity error (<5%) and high linearity (~0.99), as expected. Based on the superior electromechanical performance of these sensors, potential applications in physiological signal recognition are demonstrated as well, and such a strategy could shed more light on demand-oriented scenarios, including designable working ranges and linear sensitivity for next-generation wearable devices.https://doi.org/10.1038/s41378-022-00477-w |
| spellingShingle | Zhenjin Xu Dezhi Wu Zhiwen Chen Zhongbao Wang Cong Cao Xiangyu Shao Gang Zhou Shaohua Zhang Lingyun Wang Daoheng Sun A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model Microsystems & Nanoengineering |
| title | A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| title_full | A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| title_fullStr | A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| title_full_unstemmed | A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| title_short | A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| title_sort | flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model |
| url | https://doi.org/10.1038/s41378-022-00477-w |
| work_keys_str_mv | AT zhenjinxu aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT dezhiwu aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT zhiwenchen aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT zhongbaowang aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT congcao aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT xiangyushao aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT gangzhou aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT shaohuazhang aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT lingyunwang aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT daohengsun aflexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT zhenjinxu flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT dezhiwu flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT zhiwenchen flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT zhongbaowang flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT congcao flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT xiangyushao flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT gangzhou flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT shaohuazhang flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT lingyunwang flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel AT daohengsun flexiblepressuresensorwithhighlycustomizablesensitivityandlinearityviapositivedesignofmicrohierarchicalstructureswithahyperelasticmodel |