High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

This paper reports on a significant further improvement of the high temperature stability of RuAl thin films (110 nm) on the piezoelectric Ca<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>3</mn> </msub> &l...

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Bibliographic Details
Main Author:	Marietta Seifert
Format:	Article
Language:	English
Published:	MDPI AG 2020-04-01
Series:	Materials
Subjects:	SAW sensors interdigital transducer material high temperature stability RuAl thin films CTGS
Online Access:	https://www.mdpi.com/1996-1944/13/7/1605

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