Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy

Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy

Subsurface damage (SSD), having a great impact on the laser-induced damage threshold (LIDT) of ultra-smooth optics applied in high-power laser systems, should be tightly controlled. An improved total internal reflection microscopy (TIRM), combined with digital image processing techniques, is propose...

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Bibliographic Details
Main Authors: Kaizao Ni, Xin Cheng, Baoming Huang, Shijie Liu, Jianda Shao, Zhouling Wu, Jian Chen, Ming Huang
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Applied Sciences
Subjects:
subsurface damage
total internal reflection microscopy
micro-focusing control
definition curve
Online Access:https://www.mdpi.com/2076-3417/9/9/1819

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