The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning

Abstract Plasma cleaning is an effective method for removing micro/nanoparticle particles, thus solving the pollution problem of micro/nanoparticle instruments. However, the lack of research on the phase transition evolution law of micro/nanoparticles under the action of plasma affects the populariz...

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Main Authors: Shijie Li, Changtao He, Na Xie, Jing Xiao, Junpu Zhao, Jinghua Han, Guoying Feng, Qianqian Song
Format: Article
Language:English
Published: Nature Portfolio 2023-09-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-41405-w
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author Shijie Li
Changtao He
Na Xie
Jing Xiao
Junpu Zhao
Jinghua Han
Guoying Feng
Qianqian Song
author_facet Shijie Li
Changtao He
Na Xie
Jing Xiao
Junpu Zhao
Jinghua Han
Guoying Feng
Qianqian Song
author_sort Shijie Li
collection DOAJ
description Abstract Plasma cleaning is an effective method for removing micro/nanoparticle particles, thus solving the pollution problem of micro/nanoparticle instruments. However, the lack of research on the phase transition evolution law of micro/nanoparticles under the action of plasma affects the popularization and application of this method and is the key factor that affects the cleaning quality. The focus of this study is to analyze this law. Through experimental observation and finite element simulation, the spatial phase transition distribution characteristics of particles and the influence law of laser parameters are analyzed. Moreover, the effect of the particle phase transition on the cleaning process is discussed. The removal threshold and the best removal area of different particles are presented, and a reference and guidance for the follow-up development of laser-plasma shock wave removal technology are provided.
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spelling doaj.art-d6a9081172f64569b78519dd2bde21782023-11-26T13:13:52ZengNature PortfolioScientific Reports2045-23222023-09-0113111310.1038/s41598-023-41405-wThe spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaningShijie Li0Changtao He1Na Xie2Jing Xiao3Junpu Zhao4Jinghua Han5Guoying Feng6Qianqian Song7College of Electronics and Information Engineering, Sichuan UniversitySichuan Jiuzhou Electric Group Co., Ltd.Laser Fusion Research Center, China Academy of Engineering PhysicsCollege of Electronics and Information Engineering, Sichuan UniversityLaser Fusion Research Center, China Academy of Engineering PhysicsCollege of Electronics and Information Engineering, Sichuan UniversityCollege of Electronics and Information Engineering, Sichuan UniversityCollege of Electronics and Information Engineering, Sichuan UniversityAbstract Plasma cleaning is an effective method for removing micro/nanoparticle particles, thus solving the pollution problem of micro/nanoparticle instruments. However, the lack of research on the phase transition evolution law of micro/nanoparticles under the action of plasma affects the popularization and application of this method and is the key factor that affects the cleaning quality. The focus of this study is to analyze this law. Through experimental observation and finite element simulation, the spatial phase transition distribution characteristics of particles and the influence law of laser parameters are analyzed. Moreover, the effect of the particle phase transition on the cleaning process is discussed. The removal threshold and the best removal area of different particles are presented, and a reference and guidance for the follow-up development of laser-plasma shock wave removal technology are provided.https://doi.org/10.1038/s41598-023-41405-w
spellingShingle Shijie Li
Changtao He
Na Xie
Jing Xiao
Junpu Zhao
Jinghua Han
Guoying Feng
Qianqian Song
The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
Scientific Reports
title The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
title_full The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
title_fullStr The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
title_full_unstemmed The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
title_short The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning
title_sort spatial phase transition of micro nano particles and its effect on the cleaning efficiency of laser plasma shock wave cleaning
url https://doi.org/10.1038/s41598-023-41405-w
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