The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning

Abstract Plasma cleaning is an effective method for removing micro/nanoparticle particles, thus solving the pollution problem of micro/nanoparticle instruments. However, the lack of research on the phase transition evolution law of micro/nanoparticles under the action of plasma affects the populariz...

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Bibliographic Details
Main Authors: Shijie Li, Changtao He, Na Xie, Jing Xiao, Junpu Zhao, Jinghua Han, Guoying Feng, Qianqian Song
Format: Article
Language:English
Published: Nature Portfolio 2023-09-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-41405-w