Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe
The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This pa...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/12/2221 |
| _version_ | 1797380015481946112 |
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| author | Liang Yu Xingyang Feng Pengcheng Hu Xionglei Lin Tao Jing |
| author_facet | Liang Yu Xingyang Feng Pengcheng Hu Xionglei Lin Tao Jing |
| author_sort | Liang Yu |
| collection | DOAJ |
| description | The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method’s feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 μrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 μrad, respectively. |
| first_indexed | 2024-03-08T20:32:22Z |
| format | Article |
| id | doaj.art-d6c4019bf8ed46a0ab46591054423147 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-08T20:32:22Z |
| publishDate | 2023-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-d6c4019bf8ed46a0ab465910544231472023-12-22T14:25:27ZengMDPI AGMicromachines2072-666X2023-12-011412222110.3390/mi14122221Development of a 3-DOF Angle Sensor Based on a Single Laser Interference ProbeLiang Yu0Xingyang Feng1Pengcheng Hu2Xionglei Lin3Tao Jing4Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, ChinaUltra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, ChinaThe development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method’s feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 μrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 μrad, respectively.https://www.mdpi.com/2072-666X/14/12/22213-DOF angle measurementsingle beam interferencewavefront interference |
| spellingShingle | Liang Yu Xingyang Feng Pengcheng Hu Xionglei Lin Tao Jing Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe Micromachines 3-DOF angle measurement single beam interference wavefront interference |
| title | Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe |
| title_full | Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe |
| title_fullStr | Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe |
| title_full_unstemmed | Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe |
| title_short | Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe |
| title_sort | development of a 3 dof angle sensor based on a single laser interference probe |
| topic | 3-DOF angle measurement single beam interference wavefront interference |
| url | https://www.mdpi.com/2072-666X/14/12/2221 |
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