Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity
This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005-01-01
|
| Series: | Moldavian Journal of the Physical Sciences |
| Online Access: | https://mjps.nanotech.md/archive/2005/article/3072 |
| _version_ | 1818902473704734720 |
|---|---|
| author | Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei |
| author_facet | Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei |
| author_sort | Brînzari, Vladimir |
| collection | DOAJ |
| description | This paper presents result of investigation aimed at the improvement of gas sensitive
properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen
plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by
spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin
film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing
by order. It is concluded that combination of HF oxygen plasma treatment and surface
sensibilization through surface doping is an effective way to considerable improvement of gas
sensitive properties of tin dioxide based TFGS. |
| first_indexed | 2024-12-19T20:36:13Z |
| format | Article |
| id | doaj.art-d76a8dd7ff1c4d958660d5b502d773b4 |
| institution | Directory Open Access Journal |
| issn | 1810-648X 2537-6365 |
| language | English |
| last_indexed | 2024-12-19T20:36:13Z |
| publishDate | 2005-01-01 |
| publisher | D.Ghitu Institute of Electronic Engineering and Nanotechnologies |
| record_format | Article |
| series | Moldavian Journal of the Physical Sciences |
| spelling | doaj.art-d76a8dd7ff1c4d958660d5b502d773b42022-12-21T20:06:33ZengD.Ghitu Institute of Electronic Engineering and NanotechnologiesMoldavian Journal of the Physical Sciences1810-648X2537-63652005-01-0141981013072Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivityBrînzari, VladimirKorotcenkov, GhenadieDmitriev, SergheiThis paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is concluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS.https://mjps.nanotech.md/archive/2005/article/3072 |
| spellingShingle | Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity Moldavian Journal of the Physical Sciences |
| title | Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_full | Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_fullStr | Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_full_unstemmed | Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_short | Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_sort | plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| url | https://mjps.nanotech.md/archive/2005/article/3072 |
| work_keys_str_mv | AT brinzarivladimir plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity AT korotcenkovghenadie plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity AT dmitrievserghei plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity |