Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity
This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005-01-01
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| Series: | Moldavian Journal of the Physical Sciences |
| Online Access: | https://mjps.nanotech.md/archive/2005/article/3072 |