Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity

Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity

This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...

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Bibliographic Details
Main Authors: Brînzari, Vladimir, Korotcenkov, Ghenadie, Dmitriev, Serghei
Format: Article
Language:English
Published: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005-01-01
Series:Moldavian Journal of the Physical Sciences
Online Access:https://mjps.nanotech.md/archive/2005/article/3072

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