Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zon...

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Bibliographic Details
Main Authors: Chia-Yen Lee, Yu-Ying Lin, Chung-Kang Kuo, Lung-Ming Fu
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
hall sensor
hall effect
ion implantation
MEMS
sensor array
Online Access:https://www.mdpi.com/2072-666X/12/3/299

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